Device for in-situ measuring electrical properties of carbon nanotube array

ABSTRACT

A device for in-situ measuring electrical properties of a carbon nanotube array comprises a chamber, a substrate, a first electrode, a connecting wire, a second electrode, a support structure, and a measuring meter. The substrate, the first electrode, the connecting wire, the second electrode, and the support structure are located inside of the chamber. The measuring meter is located outside of the chamber, and the measuring meter is electrically connected to the first electrode and the second electrode. The first electrode defines a cavity, and the substrate is suspended in the cavity by interaction of the support structure, the second electrode, and the connecting wire.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims all benefits accruing under 35 U.S.C. §119 fromChina Patent Application No. 201610336949.8, filed on May 20, 2016, inthe China Intellectual Property Office, the disclosure of which isincorporated herein by reference.

FIELD

The present application relates to a device for in-situ measuringelectrical properties of carbon nanotube array and a method for in-situmeasuring electrical properties of carbon nanotube array.

BACKGROUND

Carbon nanotubes can be composed of a number of coaxial cylinders ofgraphite sheets, and have recently attracted a great deal of attentionfor use in different applications such as field emitters, gas storageand separation, chemical sensors, and high strength composites. Atpresent, it is necessary to first take the carbon nanotubes out of thereaction chamber, and then measure the electrical properties of thecarbon nanotubes. When the carbon nanotubes are taken out of thereaction chamber, the most intrinsic or primitive electrical propertiesof the carbon nanotubes will be changed by environmental changes.Accordingly, the measured electrical properties of the carbon nanotubeswill be inaccurate.

What is needed, therefore, is to provide a device for in-situ measuringelectrical properties of carbon nanotube array.

BRIEF DESCRIPTION OF THE DRAWINGS

Implementations of the present technology will now be described, by wayof example only, with reference to the attached figures, wherein:

FIG. 1 is a schematic view of one embodiment of a device for in-situmeasuring electrical properties of carbon nanotube array.

FIG. 2 is a scanning electron microscope (SEM) image of a drawn carbonnanotube film.

FIG. 3 is an SEM image of a flocculated carbon nanotube film.

FIG. 4 is an SEM image of a pressed carbon nanotube film including aplurality of carbon nanotubes arranged along the same direction.

FIG. 5 is an SEM image of a pressed carbon nanotube film including aplurality of carbon nanotubes arranged along different directions.

FIG. 6 is a schematic view of another embodiment of a first electrode ofthe device for in-situ measuring electrical properties of carbonnanotube array.

FIG. 7 is a schematic view of one embodiment of a connecting wire.

FIG. 8 is a three-dimensional exploded schematic view of one embodimentof a structure that is formed by the connecting wire and a supportstructure.

FIG. 9 is a three-dimensional exploded schematic view of anotherembodiment of the structure that is formed by the connecting wire andthe support structure.

FIG. 10 is a schematic view of one embodiment of an untwisted carbonnanotube wire structure.

FIG. 11 is a schematic view of another embodiment of a twisted carbonnanotube wire structure.

FIG. 12 is an SEM image of a twisted carbon nanotube wire.

FIG. 13 is an SEM image of an untwisted carbon nanotube wire.

FIG. 14 is a three-dimensional exploded schematic view of one embodimentof a structure that is formed by the connecting wire, a secondelectrode, and the support structure.

FIG. 15 is a process flow of one embodiment of a method for in-situmeasuring electrical properties of carbon nanotube array.

FIG. 16 is a curve of time-open circuit voltage measured by the deviceof FIG. 1 and the method of FIG. 15.

FIG. 17 is a curve of time-short circuit current measured by the deviceof FIG. 1 and the method of FIG. 15.

DETAILED DESCRIPTION

It will be appreciated that for simplicity and clarity of illustration,where appropriate, reference numerals have been repeated among thedifferent figures to indicate corresponding or analogous elements. Inaddition, numerous specific details are set forth in order to provide athorough understanding of the embodiments described herein. However, itwill be understood by those of ordinary skill in the art that theembodiments described herein can be practiced without these specificdetails. In other instances, methods, procedures, and components havenot been described in detail so as not to obscure the related relevantfeature being described. The drawings are not necessarily to scale, andthe proportions of certain parts may be exaggerated to illustratedetails and features better. The description is not to be considered aslimiting the scope of the embodiments described herein.

Several definitions that apply throughout this disclosure will now bepresented.

The term “substantially” is defined to be essentially conforming to theparticular dimension, shape or other word that substantially modifies,such that the component need not be exact. For example, substantiallycylindrical means that the object resembles a cylinder, but can have oneor more deviations from a true cylinder. The term “comprising” means“including, but not necessarily limited to”; it specifically indicatesopen-ended inclusion or membership in a so-described combination, group,series and the like.

The disclosure is illustrated by way of example and not by way oflimitation in the figures of the accompanying drawings in which likereferences indicate similar elements. It should be noted that referencesto “an” or “one” embodiment in this disclosure are not necessarily tothe same embodiment, and such references mean at least one.

Referring to FIG. 1, a device 10 for in-situ measuring electricalproperties of a carbon nanotube array 130 comprises a chamber 100, asubstrate 120, a first electrode 110, a connecting wire 140, a secondelectrode 150, a support structure 160, a measuring meter 180, and someconductive wires 170. The substrate 120, the first electrode 110, theconnecting wire 140, the second electrode 150, and the support structure160 are located inside of the chamber 100. The measuring meter 180 islocated outside of the chamber 100. The measuring meter 180 iselectrically connected to the first electrode 110 and the secondelectrode 150 by the conductive wires 170.

The material of the chamber 100 can be selected according to need. Inone embodiment, the material of the chamber 100 is quartz. In oneembodiment, the outside of the chamber 100 is surrounded by a shieldlayer (not shown). The shield layer is used to prevent the measurementof the electrical properties of the carbon nanotube array 130 from beinginterfered. The material of the shield layer can be nickel orelectro-resistance alloy.

The substrate 120 comprises a support substrate 124 and a growthsubstrate 122. The growth substrate 122 can be located on a surface ofthe support substrate 124. The support substrate 124 is used to supportthe growth substrate 122 and make the growth substrate 122 suspend inthe chamber 100. In one embodiment, the support substrate 124 is made ofinsulating material. The material of the support substrate 124 can becarbon material, silicon, or silica, so that the growth environment ofthe carbon nanotube array 130 in the chamber 100 would not becontaminated. In one embodiment, the material of the support substrate124 is quartz.

The growth substrate 122 can be a carbon nanotube structure. The carbonnanotube structure can be used for growing carbon nanotubes. The carbonnanotube structure still can be a conductor at the growing temperatureof the carbon nanotubes. The growth substrate 122 can be a drawn carbonnanotube film, a flocculated carbon nanotube film, or a pressed carbonnanotube film. In one embodiment, the growth substrate 122 is aflocculated carbon nanotube film.

Referring to FIG. 2, the drawn carbon nanotube film comprises aplurality of successive and oriented carbon nanotubes joined end-to-endby van der Waals attractive force therebetween. The carbon nanotubes inthe drawn carbon nanotube film extend along the same direction. Thecarbon nanotubes are parallel to a surface of the drawn carbon nanotubefilm. The drawn carbon nanotube film is a free-standing film. The drawncarbon nanotube film can bend to desired shapes without breaking.

If the growth substrate 122 comprises at least two stacked drawn carbonnanotube films, adjacent drawn carbon nanotube films can be combined byonly the van der Waals attractive force therebetween. Additionally, whenthe carbon nanotubes in the drawn carbon nanotube film are aligned alongone preferred orientation, an angle can exist between the orientationsof carbon nanotubes in adjacent drawn carbon nanotube films, whetherstacked or adjacent. An angle between the aligned directions of thecarbon nanotubes in two adjacent drawn carbon nanotube films can be in arange from about 0 degrees to about 90 degrees.

Referring to FIG. 3, the flocculated carbon nanotube film comprises aplurality of long, curved, disordered carbon nanotubes entangled witheach other. The flocculated carbon nanotube film can be isotropic. Thecarbon nanotubes can be substantially uniformly dispersed in theflocculated carbon nanotube film. Adjacent carbon nanotubes are actedupon by van der Waals attractive force to obtain an entangled structure.Due to the carbon nanotubes in the flocculated carbon nanotube filmbeing entangled with each other, the flocculated carbon nanotube filmhas excellent durability and can be fashioned into desired shapes with alow risk to the integrity of the flocculated carbon nanotube film.Further, the flocculated carbon nanotube film is a free-standing film.

Referring to FIGS. 4 and 5, the pressed carbon nanotube film comprises aplurality of carbon nanotubes. The carbon nanotubes in the pressedcarbon nanotube film can be arranged along the same direction, as shownin FIG. 4. The carbon nanotubes in the pressed carbon nanotube film canbe arranged along different directions, as shown in FIG. 5. The carbonnanotubes in the pressed carbon nanotube film can rest upon each other.An angle between a primary alignment direction of the carbon nanotubesand a surface of the pressed carbon nanotube film is about 0 degrees toapproximately 15 degrees. The greater the pressure applied, the smallerthe angle obtained. If the carbon nanotubes in the pressed carbonnanotube film are arranged along different directions, the pressedcarbon nanotube film can have properties that are identical in alldirections substantially parallel to the surface of the pressed carbonnanotube film. Adjacent carbon nanotubes are attracted to each other andare joined by van der Waals attractive force. Therefore, the pressedcarbon nanotube film is easy to bend to desired shapes without breaking.Further, the pressed carbon nanotube film is a free-standing film.

The term “free-standing” comprises, but not limited to, the carbonnanotube layer structure that does not have to be supported by asubstrate. For example, the free-standing carbon nanotube layerstructure can sustain the weight of itself when it is hoisted by aportion thereof without any significant damage to its structuralintegrity. So, if the free-standing carbon nanotube layer structure isplaced between two separate supporters, a portion of the free-standingcarbon nanotube layer structure, not in contact with the two supporters,would be suspended between the two supporters and yet maintain filmstructural integrity.

The first electrode 110 defines a cavity 112. The first electrode 110has a first opening 1102 and a second opening 1104 opposite to the firstopening 1102. In one embodiment, the first electrode 110 is a hollowcylinder, and the hollow portion of the cylinder forms the cavity 112,as shown in FIG. 1. In another embodiment, the first electrode 110comprises a first conductive plate 114 and a second conductive plate 116opposite to the first conductive plate 114, as shown in FIG. 6. Thefirst conductive plate 114 and the second conductive plate 116 arespaced from each other. One end of the first conductive plate 114 isconnected to one end of the second conductive plate 116 by theconductive wires 170. The materials of the first electrode 110 can beconductive materials that do not contaminate the growth environment ofthe carbon nanotube array 130 in the chamber 100. Thus, the materials ofthe first electrode 110 can be carbon material, such as graphite, carbonfiber, carbon nanotube, graphene, or combinations thereof. In oneembodiment, the first electrode 110 is a hollow cylinder formed bygraphite.

As shown in FIG. 7, the connecting wire 140 comprises a support element144 and a conductive thread 142, and the support element 144 can be usedto support the conductive thread 142. The conductive thread 142 canhelically surround the outside surface of the support element 144. Theconductive thread 142 can also be buried inside of the support element144, and two opposite ends of the conductive thread 142 protrude out ofthe support element 144. The conductive thread 142 comprises a firstthread end and a second thread end opposite to the first thread end. Thefirst thread end of the conductive thread 142 is electrically connectedto the second electrode 150, and the second thread end of the conductivethread 142 is electrically connected to the growth substrate 122. Thematerial and the shape of the support element 144 are not limited.However, in order not to contaminate the growth environment of thecarbon nanotube array 130 in the chamber 100, the material of thesupport element 144 can be carbon material. In one embodiment, thesupport element 144 is a quartz tube, the conductive thread 142 islocated inside of the quartz tube, and two opposite ends of theconductive thread 142 protrude out of the support element 144, as shownin FIG. 7. In another embodiment, the support element 144 is a quartztube, and the conductive thread 142 helically surrounds the outsidesurface of the quartz tube.

The material of the conductive thread 142 is capable of withstanding thegrowth environment of the carbon nanotube array 130 and does notintroduce impurities to contaminate the growth environment of the carbonnanotube array 130 in the chamber 100. Thus, the material of theconductive thread 142 can be carbon material. The conductive thread 142can be a carbon nanotube wire structure 1420. Referring to FIG. 10, thecarbon nanotube wire structure 1420 can comprise a plurality of carbonnanotube wires 1422 substantially parallel with each other. Referring toFIG. 11, the carbon nanotube wire structure 1420 can also comprise aplurality of carbon nanotube wires 1422 twisted with each other.

The carbon nanotube wire 1422 can be a twisted carbon nanotube wire oran untwisted carbon nanotube wire. Referring to FIG. 12, the twistedcarbon nanotube wire 1422 comprises a plurality of carbon nanotubeshelically oriented around an axial direction of the twisted carbonnanotube wire 1422. Referring to FIG. 13, the untwisted carbon nanotubewire 1422 comprises a plurality of carbon nanotubes substantiallyextending along a same direction (i.e., a direction along the length ofthe untwisted carbon nanotube wire 1422), and the carbon nanotubes aresubstantially parallel to the axis of the untwisted carbon nanotube wire1422. More specifically, the untwisted carbon nanotube wire 1422comprises a plurality of successive carbon nanotubes joined end to endby van der Waals attractive force therebetween.

A length of the carbon nanotube wire 1422 can be set as desired. Adiameter of the carbon nanotube wire 1422 can be in a range from about0.5 nanometers to about 100 micrometers. The carbon nanotubes in thecarbon nanotube wire 1422 can be single-walled, double-walled, ormulti-walled carbon nanotubes.

In addition to electrically connecting the growth substrate 122 and thesecond electrode 150, the connecting wire 140 can be used to make thegrowth substrate 122 suspend in the cavity 112 of the first electrode110. The connecting wire 140 cooperates with the support substrate 124so that the growth substrate 122 is suspended in the cavity 112 of thefirst electrode 110. Referring to FIG. 8, a hole 1240 is defined in thesupport substrate 124; the support element 144 comprises a first supportend and a second support end opposite to the first support end, thefirst support end of the support element 144 is inserted into the hole1240, and the second support end of the support element 144 is connectedto the second electrode 150, so that the support substrate 124 issuspended in the cavity 112 by the support element 144. The secondthread end of the conductive thread 142 is protruded out of the supportelement 144 and electrically connected to the growth substrate 122.

In one embodiment, as shown in FIG. 9, a portion of the support element144 that is near the first electrode 110 can be bent to form an annularstructure 146, and the support substrate 124 is located on the annularstructure 146, so that the support substrate 124 is suspended in thecavity 112 of the first electrode 110. In one embodiment, the supportelement 144 is a quartz tube; a portion of the quartz tube near thefirst electrode 110 is bent to form the annular structure 146; and thegrowth substrate 122 being free-standing structure is in direct contactwith the annular structure 146, and the support substrate 124 isomitted, as shown in FIG. 9.

As shown in FIG. 14, the second electrode 150 comprises a first end 152and a second end 154 opposite to the first end 152. The second end 154is used to fix the connecting wire 140, and the first end 152 issupported by the support structure 160. One end of the support structure160 defines a second hole 162. The first end 152 of the second electrode150 is inserted into the second hole 162 so that the second electrode150 is suspended in the chamber 100. The second end 154 of the secondelectrode 150 defines a first hole 156, and one end of the connectingwire 140 is inserted into the first hole 156. In one embodiment, one endof the support element 144 is inserted into the first hole 156, so thatthe connecting wire 140 is suspended in the chamber 100, as shown inFIG. 14. The substrate 120 supported by the connecting wire 140 can besuspended in the cavity 112 of the first electrode 110, because theconnecting wire 140 is suspended in the chamber 100. Accordingly, thegrowth substrate 122 supported by the support substrate 124 can also besuspended in the cavity 112 of the first electrode 110.

The material of the second electrode 150 can be a conductive materialwhich does not contaminate the growth environment of the carbon nanotubearray 130 in the chamber 100. Thus, the material of the second electrode150 can be carbon material, such as graphite, carbon fiber, carbonnanotube, graphene, or combinations thereof. In one embodiment, thesecond electrode 150 is a cylinder formed by graphite. The shape andmaterial of the support structure 160 can be selected according to need.In order not to contaminate the growth environment of the carbonnanotube array 130 in the chamber 100, the material of the supportstructure 160 can be carbon material, silicon, or silica. In oneembodiment, the support structure 160 is a pillar made of quartz.

The measuring meter 180 has a first terminal and a second terminalopposite to the first terminal. The first terminal of the measuringmeter 180 is electrically connected to the first electrode 110 by theconductive wires 170. The second terminal of the measuring meter 180 iselectrically connected to the second electrode 150 by the conductivewires 170. The measuring meter 180 can be a voltmeter, an ammeter, acapacitive table, a resistance meter, an electrometer, or a multimeter.In one embodiment, the measuring meter 180 is an electrometerKeithley6517A. When the measuring meter 180 is a voltmeter, the opencircuit voltage of the carbon nanotube array 130 can be obtained. Whenthe measuring meter 180 is an ammeter, the short circuit current of thecarbon nanotube array 130 can be obtained. When the measuring meter 180is a capacitive table, the capacitance of the carbon nanotube array 130can be obtained. When the measuring meter 180 is a multimeter or anelectrometer Keithley6517A, the open circuit voltage, the short circuitcurrent, or the equivalent resistance of the carbon nanotube array 130can be obtained.

Because the conductive wires 170 are required to extend from outsideinto the chamber 100, in order not to contaminate the growth environmentof the carbon nanotube array 130 in the chamber 100, the material of theconductive wires 170 can be the carbon nanotube wire structure 1420.

Furthermore, the device 10 comprises a heater (not shown in figures)which is used to heat the chamber 100, in particular, to directly heatthe growth substrate 122.

In one embodiment, the use of the device 10 comprises follow steps:

S1, providing the growth substrate 122 having a first surface and asecond surface opposite to the first surface on the substrate 120,wherein the second surface of the growth substrate 122 is in directcontact with the support substrate 124;

S2, providing a catalyst layer 200 on the first surface of the growthsubstrate 122 to form a composite structure;

S3, placing the composite structure in the chamber 100;

S4, supplying the carbon source gas, protective gas, and hydrogen to thechamber 100, and growing the carbon nanotube array 130 on the growthsubstrate 122 at a temperature from about 600 degrees Celsius to about1200 degrees Celsius; and

S5, obtaining the open circuit voltage, the short circuit current, orthe equivalent resistance of the carbon nanotube array 130.

In the step S2, the catalyst layer 200 is made of a material selectedfrom the group consisting of iron (Fe), cobalt (Co), nickel (Ni), and analloy thereof. In one embodiment, the catalyst layer is Fe. The methodfor forming the catalyst layer 200 is not limited, such as lithography,sputtering, deposition, vapor deposition. In one embodiment, thecatalyst layer 200 is vapor-deposited on the first surface of the growthsubstrate 122, and the thickness of the catalyst layer 200 is 1nanometre. In one embodiment, the catalyst layer 200 is prepared bydripping about 1 mL mixed solution consisting of 50 mmol/L ethanolsolution of Fe(NO₃)₃ and 50 mmol/L ethanol solution of Al(NO₃)₃ on theflocculated carbon nanotube film.

In the step S4, the carbon source gas comprises alkyne or hydrocarbon.The protective gas is an inert gas. In one embodiment, the protectivegas is argon gas, and the volume flow of argon gas is 400 sccm. Thetemperature of the growth substrate is in a range from about 600 degreesCelsius to about 1200 degrees Celsius. In one embodiment, the chamber100 is purged with argon gas, and then a mixed gas of C₂H₂ and hydrogenis supplied into the chamber 100, and the carbon nanotube array 130 isgrown at about 700 degrees Celsius. The volume flow of C₂H₂ is in arange from about 1 sccm to about 1.5 sccm. The volume flow of hydrogenis about 200 sccm.

In the step S5, after obtaining the voltage and the capacitance of thecarbon nanotube array 130, the quantity of electric charge of the carbonnanotube array 130 can be obtained by formula: Q=U×C; wherein thequantity of electric charge is defined as Q, the voltage is defined asU, and the capacitance is defined as C.

Referring to FIGS. 1 and 15, in one embodiment, a method for in-situmeasuring electrical properties of carbon nanotubes comprises the steps:

S1′, placing the first electrode 110 in the chamber 100, wherein thefirst electrode 110 defines the cavity 112;

S2′, suspending the growth substrate 122 inside of the cavity 112, andlocating the catalyst layer 200 on the first surface of the growthsubstrate 122;

S3′, providing the measuring meter 180 having the first terminal and thesecond terminal opposite to the first terminal, wherein the firstterminal is electrically connected to the first electrode 110, and thesecond terminal is electrically connected to the growth substrate 122;

S4′, supplying the carbon source gas, protective gas, and hydrogen tothe chamber 100 and the cavity 112, heating the chamber 100, and growingthe carbon nanotubes on the catalyst layer 200;

S5, obtaining the electrical properties of carbon nanotubes from themeasuring meter 180.

In the step S1′, the first electrode 110 needs to satisfy at least twoconditions. The first condition is that the first electrode 110 is usedfor allowing the growth substrate 122 to be in an equipotentialenvironment, to collect all electric charges generated during the growthof the carbon nanotubes. The second condition is that the firstelectrode 110 is used for allowing the gas flows of the carbon sourcegas and the protecting gas to pass. Thus, the first electrode 110defines the cavity 112. When the growth substrate 122 is located insideof the cavity 112, the growth substrate 122 is located in theequipotential environment. In addition, the first electrode 110 has thefirst opening 1102 and the second opening 1104, so that the gas flows ofthe carbon source gas and the protecting gas pass through the cavity112.

In one embodiment, the first electrode 110 is a hollow cylinder, and thehollow portion of the cylinder forms the cavity 112, as shown in FIG. 1.In another embodiment, the first electrode 110 comprises the firstconductive plate 114 and the second conductive plate 116 opposite to thefirst conductive plate 114, the first conductive plate 114 and thesecond conductive plate 116 form the cavity 112, as shown in FIG. 6. Thefirst conductive plate 114 and the second conductive plate 116 arespaced from each other. One end of the first conductive plate 114 isconnected to one end of the second conductive plate 116 by theconductive wires 170. The materials of the first electrode 110 can beconductive materials that do not contaminate the growth environment ofthe carbon nanotubes in the chamber 100. Thus, the materials of thefirst electrode 110 can be carbon material, such as graphite, carbonfiber, carbon nanotube, graphene, or combinations thereof. In oneembodiment, the first electrode 110 is a hollow cylinder formed bygraphite

In the step S2′, the growth substrate 122 needs to satisfy at least twoconditions. The first condition is that the growth substrate 122 can beused for growing carbon nanotubes. The second condition is that thegrowth substrate 122 can still be a conductor at the growing temperatureof the carbon nanotubes. The growth substrate 122 can be a drawn carbonnanotube film, a flocculated carbon nanotube film, or a pressed carbonnanotube film. In one embodiment, the growth substrate 122 is aflocculated carbon nanotube film.

The growth substrate 122 needs to be suspended inside of the cavity 112and spaced from the first electrode 110, and the growth substrate 122cannot be in contact with the first electrode 110. The reason are asfollows. The growth substrate 122 is suspended inside of the cavity 112.The first terminal of the measuring meter 180 is electrically connectedto the first electrode 110, and the second terminal of the measuringmeter 180 is electrically connected to the growth substrate 122. Thecarbon source gas and the hydrogen gas inside of the cavity 112 would beionized into positive ions and negative ions, such as H⁺ or C₂H⁻ at thegrowing temperature of the carbon nanotubes. The electric charges aregenerated during the growth process of the carbon nanotubes of thecarbon nanotube array 130. The electric charges are transferred to thepositive ions and the negative ions. Thus, the positive ions and thenegative ions are conductive and diffuse inside of the cavity 112. Thus,the conductive positive ions and the conductive negative ions wouldcause the growth substrate 122 to be electrically connected to the firstelectrode 110. The first electrode 110 collects the charged positiveions and the charged negative ions. However, the concentration of thepositive ions and the negative ions are low, thus the equivalentresistances of the positive ions and the negative ions are large. Theequivalent resistances of the positive ions and the negative ions aregreater than the resistance of the support structure 160 at thetemperature of growing the carbon nanotubes. When the support structure160 is placed in the cavity 112 of the first electrode 110 and thematerial of the support structure 160 is quartz, the growth temperatureof the carbon nanotubes will cause the quartz support structure 160 tobe conductive. The support structure 160 is placed in a region away fromthe first electrode 110, to prevent the support structure 160 from beingelectrically conductive. Thus, the current measured by the measuringmeter 180 is the current transferred by the positive ions and thenegative ions. The current measured by the measuring meter 180 is thecurrent generated during the growth of the carbon nanotubes. A loop isformed between the measuring meter 180, the first electrode 110, thepositive ions or negative ions, the growth substrate 122, and the carbonnanotubes. Thus, the electrical properties of carbon nanotubes can bemeasured by the measuring meter 180.

The principle of in-situ measuring electrical properties of carbonnanotubes is as follow. The electric charges that is generated ingrowing the carbon nanotubes is transferred to the positive ions and thenegative ions that are generated by the ionization of the carbon sourcegas and the hydrogen. When the growth substrate 122 is suspend in thecavity 112, the first electrode 110 collects the charged positive ionsand the charged negative ions. The electric charges carried by thepositive ions and the negative ions can pass through the measuring meter180. Therefore, the current measured by the measuring meter 180 is thecurrent generated during the growth of the carbon nanotubes. Theelectric charges generated in growing the carbon nanotubes and theelectric charges transferring can be obtained.

If the growth substrate 122 directly contacts with the first electrode110, the charges of the carbon nanotubes would be transported to thefirst electrode 110 by the growth substrate 122 due to the goodconductivity of the growth substrate 122. If the growth substrate 122directly contacts with the first electrode 110, the electric chargescollected by the first electrode 110 cannot pass through the measuringmeter 180. Thus, the electrical properties of carbon nanotubes cannot bemeasured by the measuring meter 180. The electric charges generation andtransferring in growing the carbo nanotubes cannot be obtained. Thus, itis necessary to suspend the growth substrate 122 in the cavity 112 ofthe first electrode 110.

The method for suspending the growth substrate 122 inside of the cavity112 is not limited. In one embodiment, one method for suspending thegrowth substrate 122 inside of the cavity 112 is provided. The method isdescribed below.

The connecting wire 140, the second electrode 150, and the supportstructure 160 are inside of the chamber 100. The connecting wire 140comprises the support element 144 and the conductive thread 142, and thesupport element 144 can be used to support the conductive thread 142.The first thread end of the conductive thread 142 is electricallyconnected to the second electrode 150, and the second thread end of theconductive thread 142 is electrically connected to the growth substrate122. The conductive thread 142 can helically surround the outsidesurface of the support element 144. The conductive thread 142 can alsobe buried inside of the support element 144, and two opposite ends ofthe conductive thread 142 protrude out of the support element 144. Thesupport structure 160 defines the second hole 162. The second electrode150 comprises the first end 152 and the second end 154 opposite to thefirst end 152. The first end 152 of the second electrode 150 is insertedinto the second hole 162 so that the second electrode 150 is suspendedin the chamber 100. The second end 154 of the second electrode 150defines the first hole 156, and one end of the support element 144 isinserted into the first hole 156 so that the connecting wire 140 issuspended in the chamber 100, as shown in FIG. 14.

A portion of the support element 144 near the first electrode 110 isbent to form the annular structure 146. The growth substrate 122 is afree-standing structure. Thus, the support substrate 124 is optional,and the growth substrate 122 is in contact with the annular structure146, as shown in FIG. 9. The materials of the connecting wire 140, thesecond electrode 150, the support structure 160, and the method fordisposing the catalyst layer 200 are described in detail above, and willnot be described again.

In the step S3′, in one embodiment, the first thread end of theconductive thread 142 is electrically connected to the second electrode150, and the second thread end of the conductive thread 142 iselectrically connected to the growth substrate 122. Thus, the measuringmeter 180 is electrically connected to the growth substrate 122 byelectrically connecting the second terminal of the measuring meter 180to the second electrode 150.

In the step S4′, the method for growing the carbon nanotubes is notlimited. In one embodiment, the carbon source gas, the protective gas,and the hydrogen are supplied to the chamber 100, and the chamber 100 isheated to be the temperature from about 600 degrees Celsius to about1200 degrees Celsius, to grow the carbon nanotubes on the catalyst layer200. The specific parameters of the carbon source gas, the protectinggas and the hydrogen gas, and the heating modes are described in detailabove, and are not repeated here.

In the step S5′, the measuring meter 180 can be a voltmeter, an ammeter,a capacitive table, a resistance meter, an electrometer, or amultimeter. The electrical properties of carbon nanotubes can be readfrom the measuring meter 180. The electrical properties of the carbonnanotubes reflect the charge generation and the charge transfer in thegrowth of carbon nanotubes. In one embodiment, the measuring meter 180is an electrometer Keithley6517A. When the measuring meter 180 is avoltmeter, the open circuit voltage of the carbon nanotubes can beobtained. When the measuring meter 180 is an ammeter, the short circuitcurrent of the carbon nanotubes can be obtained. When the measuringmeter 180 is a capacitive table, the capacitance of the carbon nanotubescan be obtained. When the measuring meter 180 is a multimeter or theelectrometer Keithley6517A, the open circuit voltage, the short circuitcurrent, or the equivalent resistance of the carbon nanotubes can beobtained. In addition, the quantity of electric charge of the carbonnanotubes can be obtained by the formula: Q=U×C, wherein the quantity ofelectric charge is defined as Q, the voltage is defined as U, and thecapacitance is defined as C.

Referring to FIG. 16, the abscissa is the time, the ordinate is the opencircuit voltage. When the flow of the carbon source gas C₂H₂ increases,the open circuit voltage becomes larger. When the flow of the carbonsource gas C₂H₂ decreases, the open circuit voltage becomes smaller.

In the first time period from 0 to about 2000 seconds, only Ar and H₂exist in the chamber 100, and there is no C₂H₂ in the chamber 100. Theopen circuit voltage is about −0.22 volts in the first time period. Inthe second time period from about 2000 seconds to about 2220 seconds,C₂H₂ are supplied into the chamber 100, and there are simultaneously Ar,H₂, and C₂H₂ in the chamber 100. The open circuit voltage is graduallyincreased, and the maximum of the open circuit voltage is about −0.35volts in the second time period. Subsequently, when the flow of thecarbon source gas C₂H₂ decreases, the open circuit voltage becomessmaller again. In the third time period from about 2220 seconds to about2500 seconds, there is no C₂H₂ in the chamber 100, and only Ar and H₂are in the chamber 100. The open circuit voltage is gradually reduced toabout −0.22 volts. And then C₂H₂ is supplied into the chamber 100, theopen circuit voltage gradually increases.

As shown in FIG. 16, the flow of the carbon source gas in the chamber100 can affect the value of the open circuit voltage. The carbonnanotube array 130 is actually grown during introducing the carbonsource gas. Therefore, the carbon nanotubes of the carbon nanotube array130 can affect the value of the open circuit voltage. It can be inferredthat the voltage obtained from the measuring meter 180 can reflect theopen circuit voltage of the carbon nanotube array 130.

Referring to FIG. 17, the abscissa is the time, the ordinate is theshort circuit current. When the flow of the carbon source gas C₂H₂increases, the short-circuit current becomes larger. When the flow ofthe carbon source gas C₂H₂ decreases, the short-circuit current becomessmaller.

In the first time period from 0 to about 1600 seconds, only Ar and H₂exist in the chamber 100, and there is no C₂H₂ in the chamber 100. Theshort circuit current is almost about 0 pA in the first time period. Inthe second time period from about 1600 seconds to about 1750 seconds,C₂H₂ are supplied into the chamber 100, and there are simultaneously Ar,H₂, and C₂H₂ in the chamber 100. The short circuit current begins toappear and gradually increases, and the maximum of the short circuitcurrent is about −4 pA in the second time period. Subsequently, when theflow of the carbon source gas C₂H₂ decreases, the short-circuit currentbecomes smaller again. In the third time period from about 1750 secondsto about 2250 seconds, there is no C₂H₂ in the chamber 100, and only Arand H₂ are in the chamber 100. The short circuit current is graduallyreduced to 0 pA. And then C₂H₂ is supplied into the chamber 100, theshort circuit current gradually increases.

As shown in FIG. 17, the flow of the carbon source gas in the chamber100 can affect the value of the short circuit current. The carbonnanotube array 130 is actually grown during the carbon source gas isbeing introduced. Therefore, the carbon nanotubes of the carbon nanotubearray 130 can affect the value of the short circuit current. It can beinferred that the current obtained from the measuring meter 180 canreflect the short circuit current of the carbon nanotube array 130.

From the analysis of FIGS. 16 and 17, it can be seen that the device 10can detect the in-situ charge accumulation of the carbon nanotube array130 at each time during the growth of the carbon nanotube array 130.Thus, the growth situation of carbon nanotubes can be obtained, which isgreat significance to study the growth mechanism of carbon nanotubes.

In summary, the carbon nanotube array 130 is always in the chamber 100during the measurement of electrical properties of the carbon nanotubearray 130, so that the carbon nanotube array 130 is always in the growthenvironment. The growth environment of the carbon nanotube array 130 isthe same as the measurement environment of electrical properties of thecarbon nanotube array 130. Therefore, the most intrinsic electricalproperties of the carbon nanotube array 130 can be measured, whichimproves the accuracy of electrical properties of the carbon nanotubearray 130.

The embodiments shown and described above are only examples. Even thoughnumerous characteristics and advantages of the present technology havebeen set forth in the foregoing description, together with details ofthe structure and function of the present disclosure, the disclosure isillustrative only, and changes may be made in the detail, including inmatters of shape, size and arrangement of the parts within theprinciples of the present disclosure up to, and including, the fullextent established by the broad general meaning of the terms used in theclaims.

Additionally, it is also to be understood that the above description andthe claims drawn to a method may comprise some indication in referenceto certain steps. However, the indication used is only to be viewed foridentification purposes and not as a suggestion as to an order for thesteps.

What is claimed is:
 1. A device for in-situ measuring electricalproperties of a carbon nanotube array, comprising: a chamber, asubstrate, a first electrode, a connecting wire, a second electrode, asupport structure, and a measuring meter; wherein the substrate, thefirst electrode, the connecting wire, the second electrode, and thesupport structure are located inside of the chamber; the measuring meteris located outside of the chamber, and the measuring meter iselectrically connected to the first electrode and the second electrode;and the first electrode defines a cavity, and the substrate is suspendedin the cavity and electrically connected to the second electrode.
 2. Thedevice of claim 1, wherein the second electrode comprises a first endand a second end opposite to the first end, and the second end defines afirst hole; a part of the connecting wire is inserted into the firsthole; and the support structure defines a second hole, and the first endis inserted into the second hole.
 3. The device of claim 1, wherein thesubstrate comprises a growth substrate used for growing the carbonnanotube array, and the growth substrate is conductive at a growingtemperature of the carbon nanotube array.
 4. The device of claim 3,wherein the substrate further comprises a support substrate used tosupport the growth substrate.
 5. The device of claim 3, wherein thegrowth substrate comprises a plurality of carbon nanotubes.
 6. Thedevice of claim 5, wherein the plurality of carbon nanotubes areentangled with each other.
 7. The device of claim 3, wherein theconnecting wire comprises a support element and a conductive thread, thesupport element is used to support the conductive thread; the conductivethread comprises a first thread end and a second thread end opposite tothe first thread end, the first thread end is electrically connected tothe second electrode, and the second thread end is electricallyconnected to the growth substrate.
 8. The device of claim 7, wherein theconductive thread helically surrounds an outside surface of the supportelement.
 9. The device of claim 7, wherein the conductive thread isburied inside of the support element, and two opposite ends of theconductive thread protrude out of the support element.
 10. The device ofclaim 7, wherein the support element is a quartz tube.
 11. The device ofclaim 7, wherein the conductive thread is a carbon nanotube wirestructure comprising a plurality of carbon nanotubes joined end to endby van der Waals attractive force.
 12. The device of claim 11, whereinthe plurality of carbon nanotubes are helically oriented around an axialdirection of the carbon nanotube wire structure.
 13. The device of claim11, wherein the plurality of carbon nanotubes substantially extendsalong the same direction.
 14. The device of claim 1, wherein the firstelectrode is a hollow cylinder.
 15. The device of claim 1, wherein thefirst electrode comprises a first conductive plate and a secondconductive plate, wherein the first conductive plate is spaced from andelectrically connected to the second conductive plate.
 16. The device ofclaim 1, wherein the second electrode comprises a material that isselected from the group consisting of graphite, carbon fiber, carbonnanotube, and graphene.